X-ray diffuse scattering investigation of thin films

Materials Science and Engineering: B

Volumn 102, Issue 1-3, 2003, Pages 25-29

  Logothetidis, S ^a   Panayiotatos, Y ^a   Gravalidis, C ^a   Patsalas, P ^a   Zoy, A ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Boron Nitride; Carbon; Diffuse scattering; Modeling; X ray reflectivity; X rays

Indexed keywords

BORON COMPOUNDS; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BOMBARDMENT; LIGHT REFLECTION; MORPHOLOGY; NANOSTRUCTURED MATERIALS; NITRIDES; PHASE COMPOSITION; THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; X RAY SCATTERING;

X-RAY REFLECTIVITY;

SURFACE STRUCTURE;

EID: 0041511755     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00746-8     Document Type: Conference Paper

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