Thickness measurements of thin perfluoropolyether polymer films on silicon and amorphous-hydrogenated carbon with X-ray reflectivity, ESCA and optical ellipsometry

Journal of Colloid and Interface Science

Volumn 225, Issue 1, 2000, Pages 219-226

  Toney, Michael F ^a   Mate, C Mathew ^a   Leach, K Amanda ^a,c   Pocker, Daryl ^b  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b IBM   (United States)

^c UNIVERSITY OF MASSACHUSETTS   (United States)

Author keywords

Perfluoropolyether; Polymer films; Thickness; Tribology

Indexed keywords

CARBON; HYDROCARBON; LUBRICATING AGENT; PERFLUOROPOLYETHER; POLYMER; SILICON; UNCLASSIFIED DRUG;

ADSORPTION; ARTICLE; COMPARATIVE STUDY; FILM; MEASUREMENT; OPTICAL ELLIPSOMETRY; PRIORITY JOURNAL; REFRACTION INDEX; SPECTROSCOPY; STRUCTURE ANALYSIS; THICKNESS; X RAY ANALYSIS;

EID: 0034192275     PISSN: 00219797     EISSN: None     Source Type: Journal    
DOI: 10.1006/jcis.2000.6752     Document Type: Article

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