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Journal of Applied Physics

Volumn 84, Issue 10, 1998, Pages 5538-5542

Deposition of hydrogenated diamond-like carbon films under the impact of energetic hydrocarbon ions

(6) Zhang, Qing a Yoon, S F a Rusli, a Ahn, J a Yang, H a Bahr, D b

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

b BRUKER AXS GMBH (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001165094 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.368599 Document Type: Article

Times cited : (52)

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