Polycrystalline diamond formation by post-growth ion bombardment of sputter-deposited amorphous carbon films

Carbon

Volumn 37, Issue 5, 1999, Pages 865-869

  Patsalas, P ^a   Logothetidis, S ^a   Douka, P ^a   Gioti, M ^a   Stergioudis, G ^a   Komninou, Ph ^a   Nouet, G ^b   Karakostas, Th ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CRYSTAL STRUCTURE; DIAMOND FILMS; GRAPHITE; ION BOMBARDMENT; MORPHOLOGY; POLYCRYSTALLINE MATERIALS; RADIATION EFFECTS; SILICON CARBIDE; SILICON WAFERS; SPUTTER DEPOSITION; SYNTHETIC DIAMONDS;

AMORPHOUS CARBON FILMS; PLASMA SPUTTERING;

CARBON;

EID: 0032640212     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0008-6223(98)00287-5     Document Type: Article

References (23)

1. Angus J.C., Wang Y., Sunkara M. Annu. Rev. Mater. Sci. 21:1998;221.
2. Deshpandey C.V., Bunshah R.F. J. Vac. Sci. Technol. A 7:1989;2294.
3. Messier R., Badzian A.R., Badzian T., Spear K.E., Banchman P., Roy R. Thin Solid Films. 153:1987;1.
4. Spitsyn B.V., Bouilov L.L., Derjaguin B.V. J. Cryst. Growth. 52:1981;219.
5. Lifshitz Y., Lempert G.P., Grossman E. Phys. Rev. Lett. 72:1994;2753.
6. McKenzie D.R., Müller D., Pailthrope B.A. Phys. Rev. Lett. 67:1991;773.
7. Kovarik P., Bourdon E.B.D., Prince R.H. Phys. Rev. B 48:1993;12123.
8. Logothetidis S. Appl. Phys. Lett. 69:1996;158.
9. Logothetidis S., Gioti M. Mater. Sci. Eng. B 46:1997;119.
10. Logothetidis S., Lioutas Ch., Gioti M. Diam. Rel. Mat. 7:1998;449.
11. Silva S.R.P., Xu S., Tay B.X., Tan H.S., Milne W.I. Appl. Phys. Lett. 69:1996;491.
12. Barshilia et al H.C. Thin Solid Films. 258:1995;123.
13. Prawer S., Kalish R., Adel M., Richter V. Appl. Phys. Lett. 49:1986;1157.
14. Zaiser M., Banhart F. Phys. Rev. Lett. 79:1997;3680.
15. Frenklach M., Kematick R., Huang D., Howard W., Spear K.E., Phelps A.W., Koba R. J. Appl. Phys. 66:1989;395.
16. Schuster H., Goebel H. Adv. X-ray Anal. 39:1996;1.
17. Logothetidis S., Stergioudis G. Appl. Phys. Lett. 71:1997;2463.
18. Komninou Ph, Nouet G, Kehagias Th, Logothetidis S, Gioti M, Karakostas Th. Diam Relat Mater 1998: in press.
19. Bish DL, Post JE. Modern powder diffraction.In: Reviews in mineralogy, vol. 20. Mineralogical Society of America, 1989.
20. Lioutas C.B., Vouroutzis N., Logothetidis S., Boultadakis S. Carbon. 36:1998;545.
21. Logothetidis S, Patsalas P, Gioti M. Phys Rev Lett 1998:submitted.
22. Bundy F.P., Kasper J.S. J. Chem. Phys. 46:1967;3437.
23. Gioti M., Logothetidis S. Diam. Rel. Mat. 7:1998;444.