Mechanically corner-coupled square microresonator array for reduced series motional resistance

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 955-958

  Demirci, M U ^a   Abdelmoneum, M A ^a   Nguyen, C T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Crystals; Dynamic range; Electric resistance; Frequency; Impedance; Linearity; Microcavities; Micromechanical devices; Q factor; Wireless communication

Indexed keywords

ACTUATORS; CRYSTALS; ECONOMIC AND SOCIAL EFFECTS; ELECTRIC IMPEDANCE; ELECTRIC RESISTANCE; MICROCAVITIES; MICROMECHANICAL RESONATORS; MICROSYSTEMS; Q FACTOR MEASUREMENT; RESONATORS; TRANSDUCERS; WIRELESS TELECOMMUNICATION SYSTEMS;

DYNAMIC RANGE; FREQUENCY; LINEARITY; MICROMECHANICAL DEVICE; Q-FACTORS; WIRELESS COMMUNICATIONS;

SOLID-STATE SENSORS;

EID: 84944728516     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1216925     Document Type: Conference Paper

References (6)

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5. S. Timoshenko, Vibration Problems in Engineering, 4th ed. New York: Wiley, 1974.
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