Self-aligned 1.14-GHz vibrating radial-mode disk resonators

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 947-950

  Wang, Jing ^a   Ren, Zeying ^a   Nguyen, C T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Computer science; Electric variables measurement; Electrodes; Fabrication; Frequency measurement; Micromechanical devices; Resonance; Resonant frequency; System on a chip; Vibration measurement

Indexed keywords

ACTUATORS; APPLICATION SPECIFIC INTEGRATED CIRCUITS; COMPUTER SCIENCE; ELECTRIC VARIABLES MEASUREMENT; ELECTRODES; ELECTROMECHANICAL DEVICES; FABRICATION; MICROMECHANICAL RESONATORS; MICROSYSTEMS; NATURAL FREQUENCIES; RESONANCE; RESONATORS; SYSTEM-ON-CHIP; TRANSDUCERS; VIBRATION MEASUREMENT;

FABRICATION METHODOLOGY; FREQUENCY MEASUREMENTS; MICROMECHANICAL DEVICE; MICROMECHANICAL DISK RESONATORS; MICROMECHANICAL STRUCTURES; RADIAL CONTOUR MODES; RESONANCE FREQUENCIES; SYSTEM ON A CHIP;

SOLID-STATE SENSORS;

EID: 78649248034     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1216923     Document Type: Conference Paper

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