High-Q thin-film silicon resonators processed at temperatures below 110°C on glass and plastic substrates

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 633-636

  Gaspar, J ^a,b   Chu, V ^a   Conde, J P ^a,b  

^a INESC   (Portugal)

^b INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY DISSIPATION; HYDROGENATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PLASTICS; RESONATORS; SUBSTRATES; THIN FILM TRANSISTORS;

MICROELECTROMECHANICAL SYSTEM (MEMS); MICRORESONATORS; SILICON RESONATORS;

SEMICONDUCTING SILICON;

EID: 3042709857     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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