Ion irradiation of inhomogeneous Schottky barriers on silicon carbide

Journal of Applied Physics

Volumn 97, Issue 12, 2005, Pages

  Roccaforte, F ^a   Libertino, S ^a   Giannazzo, F ^a   Bongiorno, C ^a   La Via, F ^a   Raineri, V ^a  

^a CNR IMM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL ACTIVATION; ION IRRADIATION; SCHOTTKY BARRIERS; SEMICONDUCTOR TECHNOLOGY;

ANNEALING; HEAT TREATMENT; ION BEAMS; ION IMPLANTATION; IONIZING RADIATION; IRRADIATION; LEAKAGE CURRENTS; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE; TITANIUM;

SCHOTTKY BARRIER DIODES;

EID: 21744436769     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1928328     Document Type: Article

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