Quantitative carrier profiling in ion-implanted 6H-SiC

Applied Physics Letters

Volumn 79, Issue 8, 2001, Pages 1211-1213

  Giannazzo, Filippo ^a   Calcagno, Lucia ^a   Raineri, Vito ^b   Ciampolini, Lorenzo ^c   Ciappa, Mauro ^c   Napolitani, Enrico ^d  

^a UNIVERSITY OF CATANIA   (Italy)

^b CNR IMETEM   (Italy)

^c ETH ZURICH   (Switzerland)

^d UNIVERSITY OF PADOVA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035920990     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1394956     Document Type: Article

References (12)

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