Silicon-integrated uncooled infrared detectors: Perspectives on thin films and microstructures

Journal of Electronic Materials

Volumn 34, Issue 5, 2005, Pages 484-490

  Mehta, V R ^a   Shet, S ^a   Ravindra, N M ^a   Fiory, A T ^a   Lepselter, M P ^b  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^b BTL Fellows Inc   (United States)

Author keywords

Micro electro mechanical systems (MEMS); Microbolometers; Photoconductors; Photoreceivers; Photovoltaics

Indexed keywords

ARRAYS; BOLOMETERS; INTERFACES (COMPUTER); MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; PHOTOCONDUCTING MATERIALS; PHOTOVOLTAIC EFFECTS; SILICON; THIN FILMS;

MICROBOLOMETERS; PHOTORECEIVERS; QUANTUM WELL IR PHOTODETECTORS (QWIP); THIN-FILM MATERIALS;

INFRARED DETECTORS;

EID: 20344375468     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-005-0055-z     Document Type: Conference Paper

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