Microbolometers on a Flexible Substrate for Infrared Detection

IEEE Sensors Journal

Volumn 4, Issue 1, 2004, Pages 112-117

  Yildiz, Ali ^a   Çelik Butler, Zeynep ^b   Butler, Donald P ^b  

^a Southern Methodist University   (United States)

^b The University of Texas at Arlington   (United States)

Author keywords

Flexible substrates; Infrared detectors; Smart skin; Yttrium barium copper oxide (YBaCuO)

Indexed keywords

CMOS INTEGRATED CIRCUITS; INFRARED DETECTORS; LITHOGRAPHY; MONITORING; POLYIMIDES; PROBLEM SOLVING; SILICON WAFERS; THIN FILM TRANSISTORS; YTTERBIUM COMPOUNDS;

FLEXIBLE SUBSTRATES; SMART SKIN; YTTRIUM BARIUM COPPER OXIDE (YBACUO);

BOLOMETERS;

EID: 2342544814     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2003.820328     Document Type: Article

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