IR microbolometer with self-supporting structure operating at room temperature

Infrared Physics and Technology

Volumn 45, Issue 1, 2004, Pages 53-57

  Wang, Hongchen ^a   Yi, Xinjian ^a   Huang, Guang ^a   Xiao, Jing ^a   Li, Xiongwei ^a   Chen, Sihai ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Microbolometer array; Microbridge array; Uncooled IR detector; Vanadium oxides

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC CURRENTS; FABRICATION; INFRARED DEVICES; MICROMACHINING; VANADIUM COMPOUNDS;

MICROBOLOMETERS;

BOLOMETERS;

EID: 0344897780     PISSN: 13504495     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1350-4495(03)00178-6     Document Type: Article

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