A high fill-factor infrared bolometer using micromachined multilevel electrothermal structures

IEEE Transactions on Electron Devices

Volumn 46, Issue 7, 1999, Pages 1489-1491

  Lee, Hyung Kew ^a   Yoon, Jun Bo ^a   Yoon, Euisik ^a   Ju, Sang Baek ^b   Yong, Yoon Joong ^b   Lee, Wook ^b   Kim, Sang Gook ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Daewoo Electronics Co   (South Korea)

Author keywords

Bolometer; Electrothermal detection; Fill factor; IR sensor; Micromachine

Indexed keywords

BOLOMETERS; MICROMACHINING; RESISTORS; THIN FILM DEVICES;

ELECTROTHERMAL DETECTION; FILL-FACTOR;

INFRARED DETECTORS;

EID: 0032652153     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.772496     Document Type: Article

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