Amorphous silicon-based uncooled microbolometer technology for low-cost IRFPA

Sensors and Materials

Volumn 12, Issue 6, 2000, Pages 365-373

  Bain, Astrid ^a   Martin, Jean Luc ^a   Mottin, Eric ^a   Ouvrier Buffet, Jean Louis ^a   Tissot, Jean Luc ^a   Tronel, Robert ^a   Vilain, Michel ^a   Yon, Jean Jacques ^a  

^a CEA LETI   (France)

Author keywords

Amorphous silicon; Infrared focal plane array; IRFpa; Thermal imaging; Uncooled microbolometer

Indexed keywords

EID: 0038999821     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)

1. J. L. Tissot, F. Rothan, C. Vedel, M. Vilain and J. J. Yon: SPIE 3379, Infrared Detectors and Focal Plane Arrays V (Orlando, USA, 1998).
2. J. L. Tissot, F. Rothan, C. Vedel, M. Vilain and J. J. Yon: SPIE 3436, Infrared Technology and Applications XXIV (San Diego, USA, 1998).
3. C. Vedel, J. L. Martin, J. L. Ouvrier-Buffet, J. L. Tissot, M. Vilain and J. J. Yon: IRFPA SPIE 3698 Infrared Technology and Application XXV (Orlando, Cal, USA, 1999).
4. J. L. Tissot, J. L. Martin, E. Mottin, M. Vilain, J. J. Yon and J. P. Chatard: 320 × 240 Microbolometer Uncooled IRFPA Development, to be published in SPIE 4130 (San Diego, USA, 2000).