High-efficiency and high-speed silicon metal-semiconductor-metal photodetectors operating in the infrared

Applied Physics Letters

Volumn 70, Issue 6, 1997, Pages 753-755

  Chen, Erli ^a   Chou, Stephen Y ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; EFFICIENCY; ELECTROOPTICAL EFFECTS; INFRARED RADIATION; LIGHT REFLECTION; LIGHT SCATTERING; MIRRORS; SILICON ON INSULATOR TECHNOLOGY; SOLID STATE LASERS;

CARRIER COLLECTION; ELECTROOPTIC SAMPLING; IMPULSE RESPONSE; METAL SEMICONDUCTOR METAL DEVICES; SCATTERING BURIED BACKSIDE REFLECTORS;

PHOTODETECTORS;

EID: 0031078109     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118270     Document Type: Article

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