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Volumn 21, Issue 3, 2003, Pages 1027-1031
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Enhanced infrared detection characteristics of VOx films prepared using alternating V2O5 and V layers
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Author keywords
[No Author keywords available]
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Indexed keywords
BOLOMETERS;
INFRARED DETECTORS;
MULTILAYERS;
OXIDATION;
REACTIVE ION ETCHING;
SPUTTERING;
VANADIUM COMPOUNDS;
REACTIVE SPUTTERING;
SEMICONDUCTING FILMS;
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EID: 0037780126
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (15)
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References (14)
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