Fabrication of an infrared antenna-coupled microbolometer linear array using chrome as a mask

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 6, 2003, Pages 2608-2611

  Gritz, Michael A ^a   Puscasu, Irina ^b   Spencer, David ^c   Boreman, Glenn D ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b Ion Optics Inc   (United States)

^c Department of Theoretical and Applied Mechanics and the Cornell Nanofabrication Facility   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CHROMIUM; DIPOLE ANTENNAS; ELECTRON BEAM LITHOGRAPHY; EVAPORATION; INFRARED RADIATION; INTERFEROMETERS; LIGHTING; MASKS; OPTICAL RESOLVING POWER; PLASMAS; POLYMETHYL METHACRYLATES; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICA;

ELECTRON BEAM MICRO-FABRICATORS (EBMF); MICROBOLOMETERS;

BOLOMETERS;

EID: 0942300071     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1629714     Document Type: Article

References (10)

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