Development of Si monolithic ferroelectric-microbolometer using pulsed-laser-deposited (Ba, Sr)TiO3 thin-film for uncooled chopperless infrared sensing

Sensors and Materials

Volumn 12, Issue 6, 2000, Pages 375-388

  Noda, Minoru ^g   Xu, Huaping ^a   Mukaigawa, Tomonori ^b   Zhu, Hong ^g   Hashimoto, Kazuhiko ^c   Kishihara, Hiroyuki ^d   Kubo, Ryuichi ^e   Usuki, Tatsuro ^f   Okuyama, Masanori ^g  

^a OSAKA MUNICIPAL TECHNICAL RESEARCH INSTITUTE   (Japan)

^b Hochiki Corporation   (Japan)

^c PANASONIC CORPORATION   (Japan)

^d Shimazu Corporation   (Japan)

^e MURATA MANUFACTURING CO LTD   (Japan)

^f SANYO ELECTRIC CO LTD   (Japan)

^g OSAKA UNIVERSITY   (Japan)

Author keywords

BST ferroelectric thin film; Dielectric bolometer; Ferroelectric microbolometer; Grain size effect; Micromachining; Monolithic process; Pulsed laser deposition; Thermal image sensing; Thermal isolation membranes; Uncooled infrared image sensor

Indexed keywords

EID: 0034549781     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

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