Progress in material removal mechanisms of surface polishing with ultra precision

Chinese Science Bulletin

Volumn 49, Issue 16, 2004, Pages 1687-1693

  Xu, Jin ^a   Luo, Jianbin ^a   Lu, Xinchun ^a   Zhang, Chaohui ^a   Pan, Guoshun ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

CMP; Computer hard disk; Material removal mechanism; ULSI; Wear

Indexed keywords

EID: 18744384223     PISSN: 10016538     EISSN: 18619541     Source Type: Journal    
DOI: 10.1360/04we0035     Document Type: Review

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