SCOPUS 정보 검색 플랫폼

Electrochemical and Solid-State Letters

Volumn 4, Issue 2, 2001, Pages

Chemical mechanical polishing of copper and tantalum in potassium iodate-based slurries

(2) Li, Ying a Babu, S V a

a CLARKSON UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABRASIVES; CHEMICAL MECHANICAL POLISHING; DISSOLUTION; ELECTROCHEMICAL ELECTRODES; ELECTROCHEMISTRY; PASSIVATION; PH EFFECTS; POLARIZATION; POTASSIUM COMPOUNDS; SILICA; SLURRIES; TANTALUM;

POTASSIUM IODATE; POTENTIODYNAMIC POLARIZATION; ROTATING DISK ELECTRODE;

COPPER;

EID: 0035262729 PISSN: 10990062 EISSN: None Source Type: Journal
DOI: 10.1149/1.1342185 Document Type: Article

Times cited : (52)

References (19)

1
- 0004165928
- McGraw-Hill, New York
- (1996) ULSI Technology , pp. 445
- Chang, C.Y.¹ Sze, S.M.²

2
- 0030197845
- (1996) Langmuir , vol.12 , pp. 3563
- Luo, Q.¹ Campbell, D.R.² Babu, S.V.³

3
- 0010413526
- Ph.D. Thesis, Clarkson University, Potsdam, NY
- (2000)
- Ramarajan, S.¹

4
- 0034292727
- (2000) J. Electrochem. Soc. , vol.147 , pp. 3820
- Hariharaputhiran, M.¹ Zhang, J.² Ramarajan, S.³ Keleher, J.J.⁴ Li, Y.⁵ Babu, S.V.⁶

5
- 0010415379
- Feb 22-23
- (1996) Proceedings of CMP-MIC Conference , vol.119
- Hirabayashi, H.¹ Higuchi, M.² Kinoshita, M.³ Kaneko, H.⁴ Hayasaka, N.⁵ Mase, K.⁶ Oshima, J.⁷

6
- 0029389318
- (1995) Thin Solid Films , vol.266 , pp. 238
- Carpio, R.¹ Farkas, J.² Jairath, R.³

7
- 0000246119
- (1997) Chem. Mater. , vol.9 , pp. 2101
- Luo, Q.¹ Mackay, R.A.² Babu, S.V.³

8
- 0000688858
- (1997) Microelectron. Eng. , vol.33 , pp. 259
- Zeidler, D.¹ Stavreva, Z.² Plotner, M.³ Drescher, K.⁴

9
- 0032167273
- (1998) J. Electrochem. Soc. , vol.145 , pp. 3190
- Stein, D.J.¹ Hetherington, D.L.² Guilinger, T.³ Cecchi, J.L.⁴

10
- 0032730568
- (1999) J. Electrochem. Soc. , vol.146 , pp. 376
- Stein, D.J.¹ Hetherington, D.L.² Cecchi, J.L.³

11
- 0032688973
- (1999) J. Electrochem. Soc. , vol.146 , pp. 1934
- Stein, D.J.¹ Hetherington, D.L.² Cecchi, J.L.³

12
- 0033748944
- (2000) Langmuir , vol.16 , pp. 5154
- Luo, Q.¹

13
- 0034140436
- (2000) Electrochem. Solid-State Lett. , vol.3 , pp. 95
- Hariharaputhiran, M.¹ Li, Y.² Ramarajan, S.³ Babu, S.V.⁴

14
- 0000168191
- (1966) Corrosion (Houston) , vol.22 , pp. 198
- Jones, D.A.¹ Greene, N.D.²

15
- 0010379877
- Submitted
- (2000) J. Mater. Res.
- Li, Y.¹ Hariharaputhiran, M.² Babu, S.V.³

16
- 0034188181
- (2000) Electrochem. Solid-State Lett. , vol.3 , pp. 232
- Ramarajan, S.¹ Li, Y.² Hariharaputhiran, M.³ Her, Y.-S.⁴ Babu, S.V.⁵

17
- 0003745040
- NACE, Houston
- (1974) Altas of Electrochemical Equilibria in Aqueous Solutions
- Pourbaix, M.¹

18
- 0031140808
- (1997) J. Chem. Eng. Data , vol.42 , pp. 453
- Varadarajan, T.K.¹ Ramakrishna, T.V.² Kalidas, C.³

19
- 0004098488
- AP13, W. H. Freeman and Company, New York
- (1999) Quantitative Chemical Analysis, 5th Ed.
- Harris, D.C.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.