SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Mathematics and Computers in Simulation

Volumn 68, Issue 2, 2005, Pages 145-156

Monte Carlo study of surface and line-width roughness of resist film surfaces during dissolution

(1) Patsis, G P a

a INSTITUTE OF MICROELECTRONICS (Greece)

Author keywords

Dissolution; Lattice models of polymer chains; Line edge roughness; MC; Surface roughness

Indexed keywords

LATTICE MODELS OF POLYMER CHAINS; LINE-EDGE ROUGHNESS; MOLECULAR SIMULATION; MONTE CARLO STUDY;

COMPUTER SIMULATION; DISSOLUTION; MATHEMATICAL MODELS; MICROELECTRONICS; MOLECULAR DYNAMICS; POLYMERIZATION; SURFACE ROUGHNESS; THIN FILMS;

MONTE CARLO METHODS;

EID: 17444370545 PISSN: 03784754 EISSN: None Source Type: Journal
DOI: 10.1016/j.matcom.2004.10.006 Document Type: Article

Times cited : (14)

References (50)

1
- 84888891003
- http://public.itrs.net/Files/2002Update/2002Update.pdf.

2
- 0034317711
- M. Yoshizawa, and S. Moriya J. Vac. Sci. Technol. B 18 2000 3105
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 3105
- Yoshizawa, M.¹ Moriya, S.²

3
- 11744364248
- H. Namatsu, M. Nagase, T. Yamaguchi, K. Yamazaki, and K. Kurihara J. Vac. Sci. Technol. B 16 1998 3315
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3315
- Namatsu, H.¹ Nagase, M.² Yamaguchi, T.³ Yamazaki, K.⁴ Kurihara, K.⁵

4
- 0035364688
- C.H. Diaz, H.-J. Tao, Y.-C. Ku, A. Yen, and K. Young IEEE Electr. Dev. Lett. 22 6 2001 287
- (2001) IEEE Electr. Dev. Lett. , vol.22 , Issue.6 , pp. 287
- Diaz, C.H.¹ Tao, H.-J.² Ku, Y.-C.³ Yen, A.⁴ Young, K.⁵

5
- 0037207713
- G.P. Patsis, N. Glezos, and E. Gogolides J. Vac. Sci. Technol. B 21 2003 254
- (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 254
- Patsis, G.P.¹ Glezos, N.² Gogolides, E.³

6
- 0031209139
- P.C. Tsiartas, L.W. Flanagin, C.L. Henderson, W.D. Hinsberg, I.C. Sanchez, R.T. Bonnecaze, and C.G. Willson Macromolecules 30 1997 4656
- (1997) Macromolecules , vol.30 , pp. 4656
- Tsiartas, P.C.¹ Flanagin, L.W.² Henderson, C.L.³ Hinsberg, W.D.⁴ Sanchez, I.C.⁵ Bonnecaze, R.T.⁶ Willson, C.G.⁷

7
- 0032592674
- L.W. Flanagin, V.K. Singh, and C.G. Wilson J. Polym. Sci. B: Polym. Phys. 37 1999 2103
- (1999) J. Polym. Sci. B: Polym. Phys. , vol.37 , pp. 2103
- Flanagin, L.W.¹ Singh, V.K.² Wilson, C.G.³

8
- 24644502374
- L.W. Flanagin, V.K. Singh, and C.G. Wilson J. Vac. Sci. Technol. B 17 4 1999 1371
- (1999) J. Vac. Sci. Technol. B , vol.17 , Issue.4 , pp. 1371
- Flanagin, L.W.¹ Singh, V.K.² Wilson, C.G.³

9
- 0036506042
- S.D. Burns, G.M. Schmid, P.C. Tsiartas, and C.G. Wilson J. Vac. Sci. Technol. B 20 2 2002 537
- (2002) J. Vac. Sci. Technol. B , vol.20 , Issue.2 , pp. 537
- Burns, S.D.¹ Schmid, G.M.² Tsiartas, P.C.³ Wilson, C.G.⁴

10
- 0038359112
- G.P. Patsis, V. Constantoudis, A. Tserepi, E. Gogolides, G. Grozev, and T. Hoffmann Microelectron. Eng. 67 2003 319
- (2003) Microelectron. Eng. , vol.67 , pp. 319
- Patsis, G.P.¹ Constantoudis, V.² Tserepi, A.³ Gogolides, E.⁴ Grozev, G.⁵ Hoffmann, T.⁶

11
- 84888916619
- V. Constantoudis, G.P. Patsis, and E. Gogolides SPIE 5038 2003
- (2003) SPIE , vol.5038
- Constantoudis, V.¹ Patsis, G.P.² Gogolides, E.³

12
- 0038117768
- G.P. Patsis, V. Constantoudis, A. Tserepi, and E. Gogolides J. Vac. Sci. Technol. B 21 2003 1008
- (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 1008
- Patsis, G.P.¹ Constantoudis, V.² Tserepi, A.³ Gogolides, E.⁴

13
- 0038457081
- V. Constantoudis, G.P. Patsis, A. Tserepi, and E. Gogolides J. Vac. Sci. Technol. B 21 2003 1019
- (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 1019
- Constantoudis, V.¹ Patsis, G.P.² Tserepi, A.³ Gogolides, E.⁴

14
- 0036883106
- R. Adam, Pawloski, F. Paul, and Nealey J. Vac. Sci. Technol. B 20 2002 2413
- (2002) J. Vac. Sci. Technol. B , vol.20 , pp. 2413
- Adam, R.¹ Pawloski² Paul, F.³ Nealey⁴

15
- 0001427407
- R.A. Arcus Proc. SPIE 631 1991 124
- (1991) Proc. SPIE , vol.631 , pp. 124
- Arcus, R.A.¹

16
- 4143117502
- L. Bogdanov, K.A. Valiev, L.V. Velikov, and D.Yu. Zaroslov J. Vac. Sci. Technol. B 5 1987 391
- (1987) J. Vac. Sci. Technol. B , vol.5 , pp. 391
- Bogdanov, L.¹ Valiev, K.A.² Velikov, L.V.³ Zaroslov, D.Yu.⁴

17
- 0000886684
- T.-F. Yeh, H.-Y. Shih, A. Reiser, M.A. Toukhy, and B.T. Beauchemin Jr. J. Vac. Sci. Technol. B 10 1992 715
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 715
- Yeh, T.-F.¹ Shih, H.-Y.² Reiser, A.³ Toukhy, M.A.⁴ Beauchemin Jr., B.T.⁵

18
- 0028494941
- N.A. Peppas, J.C. Wu, and E.D. Von Meerwall Macromolecules 27 1994 5626
- (1994) Macromolecules , vol.27 , pp. 5626
- Peppas, N.A.¹ Wu, J.C.² Von Meerwall, E.D.³

19
- 0024962447
- J.S. Papanu, D.S. Soane, A.T. Bell, and D.W. Hess J. Appl. Polym. Phys. 38 1989 859
- (1989) J. Appl. Polym. Phys. , vol.38 , pp. 859
- Papanu, J.S.¹ Soane, D.S.² Bell, A.T.³ Hess, D.W.⁴

20
- 0017463030
- Y.O. Tu, and A.C. Quano IBM J. Res. Dev. 21 1977 131
- (1977) IBM J. Res. Dev. , vol.21 , pp. 131
- Tu, Y.O.¹ Quano, A.C.²

21
- 0001739946
- C.A. Mack, K.E. Muller, A.B. Gardiner, J.P. Sagan, R.R. Dammel, and C.G. Wilson J. Vac. Sci. Technol. B 16 6 1998 3779
- (1998) J. Vac. Sci. Technol. B , vol.16 , Issue.6 , pp. 3779
- Mack, C.A.¹ Muller, K.E.² Gardiner, A.B.³ Sagan, J.P.⁴ Dammel, R.R.⁵ Wilson, C.G.⁶

22
- 0034188066
- M. Cheng, J. Tyminski, E. Croffie, and A. Neureuther J. Vac. Sci. Technol. B 18 2000 1294
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 1294
- Cheng, M.¹ Tyminski, J.² Croffie, E.³ Neureuther, A.⁴

23
- 0027839360
- T. Yoshimura, H. Shiraishi, J. Yamamoto, and S. Okazaki Jpn. J. Appl. Phys., Part 1 32 1993 6065
- (1993) Jpn. J. Appl. Phys., Part 1 , vol.32 , pp. 6065
- Yoshimura, T.¹ Shiraishi, H.² Yamamoto, J.³ Okazaki, S.⁴

24
- 0001764332
- J. Yamamoto, S. Uchino, T. Hattori, T. Yoshimura, and F. Murai Jpn. J. Appl. Phys., Part 1 35 1996 6511
- (1996) Jpn. J. Appl. Phys., Part 1 , vol.35 , pp. 6511
- Yamamoto, J.¹ Uchino, S.² Hattori, T.³ Yoshimura, T.⁴ Murai, F.⁵

25
- 0026438632
- D. McKean, R. Allen, P. Kasai, U. Schaedeli, and S. MacDonald Proc. SPIE 1672 1992 94
- (1992) Proc. SPIE , vol.1672 , pp. 94
- McKean, D.¹ Allen, R.² Kasai, P.³ Schaedeli, U.⁴ MacDonald, S.⁵

26
- 0033267623
- W. Henke, and M. Torkler J. Vac. Sci. Technol. B 17 1999 3112
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 3112
- Henke, W.¹ Torkler, M.²

27
- 0003952478
- J. Nakamura, K. Deguchi, and H. Ban J. Photopolym. Sci. Technol. 11 1998 571
- (1998) J. Photopolym. Sci. Technol. , vol.11 , pp. 571
- Nakamura, J.¹ Deguchi, K.² Ban, H.³

28
- 0022593979
- H.I. Smith J. Vac. Sci. Technol. B 4 1986 148
- (1986) J. Vac. Sci. Technol. B , vol.4 , pp. 148
- Smith, H.I.¹

29
- 0000029548
- N. Rau, F. Stratton, C. Fields, T. Ogawa, A. Neureuther, R. Kubena, and G. Willson J. Vac. Sci. Technol. B 16 1998 3784
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3784
- Rau, N.¹ Stratton, F.² Fields, C.³ Ogawa, T.⁴ Neureuther, A.⁵ Kubena, R.⁶ Willson, G.⁷

30
- 0033260747
- C. Nelson, S.C. Palmateer, A.R. Forte, and T.M. Lyszczarz J. Vac. Sci. Technol. B 17 1999 2488
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 2488
- Nelson, C.¹ Palmateer, S.C.² Forte, A.R.³ Lyszczarz, T.M.⁴

31
- 0343007082
- W. Hinsberg, F. Houle, J. Hoffnagle, M. Sanchez, M. Morrison, C. Nguygen, and S. Frank J. Vac. Sci. Technol. B 16 1998 3689
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3689
- Hinsberg, W.¹ Houle, F.² Hoffnagle, J.³ Sanchez, M.⁴ Morrison, M.⁵ Nguygen, C.⁶ Frank, S.⁷

32
- 0033683280
- M. Yoshizawa, and S. Moriya Proc. SPIE 3997 2000 301
- (2000) Proc. SPIE , vol.3997 , pp. 301
- Yoshizawa, M.¹ Moriya, S.²

33
- 24644487409
- G.W. Reynolds, and J.W. Taylor J. Vac. Sci. Technol. B 17 1999 334
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 334
- Reynolds, G.W.¹ Taylor, J.W.²

34
- 0035982537
- M. Yoshizawa, and S. Moriya J. Vac. Sci. Technol. B 20 2002 1342
- (2002) J. Vac. Sci. Technol. B , vol.20 , pp. 1342
- Yoshizawa, M.¹ Moriya, S.²

35
- 0026258271
- L. Schlegel, T. Ueno, N. Hayashi, and T. Iwayanagi Jpn. J. Appl. Phys., Part 1 30 1991 3132
- (1991) Jpn. J. Appl. Phys., Part 1 , vol.30 , pp. 3132
- Schlegel, L.¹ Ueno, T.² Hayashi, N.³ Iwayanagi, T.⁴

36
- 0000752766
- T.H. Fedynyshyn, J.W. Thackeray, J.H. Georger, and M.D. Denison J. Vac. Sci. Technol. B 12 1994 3888
- (1994) J. Vac. Sci. Technol. B , vol.12 , pp. 3888
- Fedynyshyn, T.H.¹ Thackeray, J.W.² Georger, J.H.³ Denison, M.D.⁴

37
- 0029307289
- K. Asakawa, T. Ushirogouchi, and M. Nakase J. Vac. Sci. Technol. B 13 1995 833
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 833
- Asakawa, K.¹ Ushirogouchi, T.² Nakase, M.³

38
- 0000125484
- T. Itani, H. Yoshino, S. Hashimoto, M. Yamana, N. Samoto, and K. Kasama Jpn. J. Appl. Phys., Part 1 35 1996 6501
- (1996) Jpn. J. Appl. Phys., Part 1 , vol.35 , pp. 6501
- Itani, T.¹ Yoshino, H.² Hashimoto, S.³ Yamana, M.⁴ Samoto, N.⁵ Kasama, K.⁶

39
- 0000581311
- T. Itani, H. Yoshino, S. Hashimoto, M. Yamana, N. Samoto, and K. Kasawa J. Vac. Sci. Technol. B 15 1997 2541
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 2541
- Itani, T.¹ Yoshino, H.² Hashimoto, S.³ Yamana, M.⁴ Samoto, N.⁵ Kasawa, K.⁶

40
- 0029517736
- T. Yoshimura, H. Shiraishi, and S. Okazaki Jpn. J. Appl. Phys., Part 1 34 1995 6786
- (1995) Jpn. J. Appl. Phys., Part 1 , vol.34 , pp. 6786
- Yoshimura, T.¹ Shiraishi, H.² Okazaki, S.³

41
- 0036883189
- J. Shin, Y. Ma, and F. Cerrina J. Vac. Sci. Technol. B 20 2002 2927
- (2002) J. Vac. Sci. Technol. B , vol.20 , pp. 2927
- Shin, J.¹ Ma, Y.² Cerrina, F.³

42
- 0037207694
- Y. Ma, J. Shin, and Franco Cerrina J. Vac. Sci. Technol. B 21 2003 112
- (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 112
- Ma, Y.¹ Shin, J.² Franco, C.³

43
- 36749105087
- E. Helfand J. Chem. Phys. 63 1975 2192
- (1975) J. Chem. Phys. , vol.63 , pp. 2192
- Helfand, E.¹

44
- 0011316364
- M.G. Bawendi, K.F. Freed, and U. Mohanty J. Chem. Phys. 84 1986 7036
- (1986) J. Chem. Phys. , vol.84 , pp. 7036
- Bawendi, M.G.¹ Freed, K.F.² Mohanty, U.³

45
- 0000348298
- G.T. Barkema, J.F. Marko, and B. Widom Phys. Rev. E 49 1994 5303
- (1994) Phys. Rev. E , vol.49 , pp. 5303
- Barkema, G.T.¹ Marko, J.F.² Widom, B.³

46
- 4243165257
- G.I. Menon, and R. Pandit Phys. Rev. Lett. 75 1995 4638
- (1995) Phys. Rev. Lett. , vol.75 , pp. 4638
- Menon, G.I.¹ Pandit, R.²

47
- 0000037764
- D.E. Jennings, Yu.A. Kuznetsov, E.G. Timoshenko, and K.A. Dawson J. Chem. Phys. 108 1998 1702
- (1998) J. Chem. Phys. , vol.108 , pp. 1702
- Jennings, D.E.¹ Kuznetsov, Yu.A.² Timoshenko, E.G.³ Dawson, K.A.⁴

48
- 0032210657
- J.A. Kulkarni, and A.N. Beris Comput. Phys. 12 1998 641
- (1998) Comput. Phys. , vol.12 , pp. 641
- Kulkarni, J.A.¹ Beris, A.N.²

49
- 0001147552
- G.I. Menon, and R. Pandit Phys. Rev. E 59 1999 787
- (1999) Phys. Rev. E , vol.59 , pp. 787
- Menon, G.I.¹ Pandit, R.²

50
- 0001350204
- P. Bruscolini, and L. Casetti Phys. Rev. E 61 2000 2208
- (2000) Phys. Rev. E , vol.61 , pp. 2208
- Bruscolini, P.¹ Casetti, L.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.