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Volumn 21, Issue 1 SPEC., 2003, Pages 254-266

Monte Carlo simulation of gel formation and surface and line-edge roughness in negative tone chemically amplified resists

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; COMPUTER SIMULATION; CROSSLINKING; DENSITY (SPECIFIC GRAVITY); DIFFUSION; GELATION; GRAPH THEORY; MOLECULAR PHYSICS; MONTE CARLO METHODS; PHOTORESISTS; RANDOM PROCESSES; SURFACE ROUGHNESS;

EID: 0037207713     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1542616     Document Type: Article
Times cited : (10)

References (37)
  • 18
    • 0004051232 scopus 로고
    • edited by E. A. Colbourn, Polymer Science and Technology Series (Wiley, New York)
    • Computer Simulation of Polymers, edited by E. A. Colbourn, Polymer Science and Technology Series (Wiley, New York, 1994).
    • (1994) Computer Simulation of Polymers
  • 20
    • 0012552930 scopus 로고    scopus 로고
    • Ph.D. thesis, National Technical University of Athens
    • G. P. Patsis, Ph.D. thesis, National Technical University of Athens (1999).
    • (1999)
    • Patsis, G.P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.