Experimental investigations into the formation of nanoparticles in a/nc-Si:H thin films

Journal of Applied Physics

Volumn 97, Issue 3, 2005, Pages

  Thompson, S ^a   Perrey, C R ^b   Carter, C B ^b   Belich, T J ^a   Kakalios, J ^a   Kortshagen, Uwe ^a  

^a University of Minnesota   (United States)

^b UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOCRYSTALLITES; SILICON INCLUSION; SOLID-STATE NUCLEATION; TEMPERATURE GRADIENT;

AMORPHOUS SILICON; DEFECTS; ELECTRIC RESISTANCE; ELECTRODES; ELECTRONIC PROPERTIES; HELIUM; HYDROGEN; HYDROGENATION; INCLUSIONS; NANOSTRUCTURED MATERIALS; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

THIN FILMS;

EID: 13744260358     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1849435     Document Type: Article

References (53)

1. R. A. Street, Hydrogenated Amorphous Silicon (Cambridge University Press, Cambridge, 1991).
2. D. L. Staebler and C. R. Wronski, Appl. Phys. Lett. 31, 292 (1977).
3. Y. Lubianiker, J. D. Cohen, H.-C. Jin, and J. R. Abelson, Phys. Rev. B 60, 4434 (1999).
4. C. R. Wronski, J. M. Pearce, R. J. Koval, X. Niu, A. S. Ferlauto, J. Koh, and R. W. Coffins, Mater. Res. Soc. Symp. Proc. 715, 459 (2002).
5. D. Kwon, C.-C. Chen, D. J. Cohen, H.-C. Jin, E. Hollar, I. Robertson, and J. R. Abelson, Phys. Rev. B 60, 4442 (1999).
6. R. Koval et al, Mater. Res. Soc. Symp. Proc. 609, A1551 (2000).
7. M. Meaudre, R. Meaudre, R. Butte, S. Vignoli, C. Longeaud, J. P. Kleider, and P. Roca i Cabarrocas, J. Appl. Phys. 86, 946 (1999).
8. P. Roca i Cabarrocas, A. Fontcuberta i Morral, and Y. Poissant, Thin Solid Films 403-404, 39 (2002).
9. R. Butte, R. Meaudre, M. Meaudre, S. Vignoli, C. Longeaud, J. P. Kleider, and P. Roca i Cabarrocas, Philos. Mag. B 79, 1079 (1999).
10. C. Longeaud, J. P. Kleider, P. Roca i Cabarrocas, S. Hamma, R. Meaudre, and M. Meaudre, J. Non-Cryst. Solids 227-230, 96 (1998).
11. R. Butte, S. Vignoli, M. Meaudre, R. Meaudre, O. Marty, L. Saviot, and P. Roca i Cabarrocas, J. Non-Cryst. Solids 266, 263 (2000).
12. A. Fontcuberta i Morral, Ph.D. thesis, Ecole Polytechnique, 2001.
13. A. Fontcuberta i Morral and P. Roca i Cabarrocas, Thin Solid Films 383, 161 (2001).
14. O. Saadane, S. Lebib, A. V. Kharchenko, C. Longeaud, and R. Roca i Cabarrocas, J. Appl. Phys. 93, 9371 (2003).
15. S. Sriraman, S. Agarwal, E. S. Aydil, and D. Maroudas, Nature (London) 418, 62 (2002).
16. T. J. Belich, S. Thompson, C. R. Perrey, U. Kortshagen, C. B. Carter, and J. Kakalios, Mater. Res. Soc. Symp. Proc. 762, A14 (2003).
17. D. B. Williams and C. B. Carter, Transmission Electron Microscopy (Plenum, New York, 1996).
18. Y. Watanabe, M. Shiratani, T. Fukuzawa, and H. Kawasaki, Plasma Sources Sci. Technol. 3, 355 (1994).
19. L. Boufendi and A. Bouchoule, Plasma Sources Sci. Technol. 3, 262 (1994).
20. L. Bouchoule, A. Plain, L. Boufendi, J. P. Blondeau, and C. Laure, J. Appl. Phys. 70, 1991 (1991).
21. L. Boufendi, J. Gaudin, S. Huet, G. Viera, and M. Dudemaine, Appl. Phys. Lett. 79, 4301 (2001).
22. A. Bouchoule and L. Boufendi, Plasma Sources Sci. Technol. 2, 204 (1993).
23. P. Belenguer, J. P. Bondeau, M. Toogood, A. Plain, A. Bouchoule, C. Laure, and J. P. Bouef, Phys. Rev. A 46, 7923 (1992).
24. C. Böhm and J. Perrin, J. Phys. D 24, 865 (1991).
25. Z. Shen and U. Kortshagen, J. Vac. Sci. Technol. A 20, 153 (2001).
26. A. V. Kharchenko, V. Suendo, and P. Roca i Cabarrocas, Thin Solid Films 427, 236 (2003).
27. G. Viera, J. Costa, F. J. Compte, F. J. Garcia, J. L. Andujar, and E. Bertran, Vacuum 53, 1 (1999).
28. K. Urban and M. Lentzen, Microsc. Microanal. 8, 8 (2002).
29. M. Lentzen, B. Jahnen, C. L. Jia, A. Thurst, K. Tillmann, and K. Urban, Ultramicroscopy 92, 233 (2002).
30. M. Lentzen, C. L. Jia, and K. Urban, Microsc. Microanal. 9, 932 (2003).
31. C. L. Jia, J. Rodriguez Contreras, J. Schubert, M. Lentzen, U. Poppe, H. Kohlstedt, K. Urban, and R. Waser, J. Cryst. Growth 247, 381 (2003).
32. C. L. Jia, M. Lentzen, and K. Urban, Science 299, 870 (2003).
33. M. Haider, H. Rose, S. Uhlemann, E. Schwan, B. Kabius, and K. Urban, Ultramicroscopy 75, 53 (1998).
34. M. Haider, S. Uhlemann, E. Schwann, H. Rose, B. Kabius, and K. Urban, Nature (London) 392, 768 (1998).
35. M. Vanecek, J. Kocka, A. Poruba, and A. Fejfar, J. Appl. Phys. 78, 6203 (1995).
36. P. Sladek, P. St'ahel, P. Roca i Cabarrocas, and P. Morin, Philos. Mag. B 77, 1049 (1998).
37. J. Kocka, M. Vanececk, and A. Triska, in Amorphous Silicon and Related Materials, edited by H. Fritzsche (World Scientific, Teanech, NJ, 1988), Vol. 1.
38. S. Knief and W. von Niessen, Phys. Rev. B 59, 12940 (1999).
39. G. D. Cody, T. Tiedje, B. Abeles, B. Brooks, and Y. Goldstein, Phys. Rev. Lett. 47, 1480 (1981).
40. F. Urbach, Phys. Rev. 92, 1324 (1953).
41. J. Tauc, R. Grigorivici, and A. Vancu, Phys. Status Solidi 15, 627 (1966).
42. S. R. Arekat, J. Non-Cryst. Solids 224, 201 (1998).
43. P. Bletzinger and M. J. Flemming, J. Appl. Phys. 62, 4688 (1987).
44. High-Resolution Transmission Electron Microscopy and Associated Techniques, edited by P. Buseck, J. Cowley, and L. Eyring (Oxford University Press, New York, 1988).
45. C. R. Perrey, C. B. Carter, and M. Lentzen, Microsc. Microanal. 9, 958 (2003).
46. C. R. Perrey, S. Thompson, M. Lentzen, U. Kortshagen, and C. B. Carter, J. Non-Cryst. Solids 343, 78 (2004).
47. G. Viera, S. Huet, M. Mikikian, and L. Boufendi, Thin Solid Films 403, 467 (2002).
48. G. Viera, M. Mikikian, E. Bertran, P. Roca i Cabarrocas, and L. Boufendi, J. Appl. Phys. 92, 4684 (2002).
49. A. Fontcuberta i Morral, R. Brenot, E. A. G. Hamers, R. Vanderhaghen, and P. Roca i Cabarrocas, J. Non-Cryst. Solids 266-269, 48 (2000).
50. H. Curtins and M. Favre, in Amorphous Silicon and Related Materials, edited by H. Fritzsche (World Scientific, Teaneck, NJ, 1988), Vol. 1.
51. G. D. Cody, in Semiconductors and Semimetals, edited by J. I. Pankove (Academic, New York, 1984), p. 11.
52. N. M. Amer and W. B. Jackson, in Semiconductors and Semimetals, edited by J. I. Pankove (Academic, New York, 1984), Vol. 21B, p. 83.
53. A. R. Middya, S. Hazra, S. Ray, A. K. Barua, and C. Longeaud, J. Non-Cryst. Solids 200, 1067 (1996).