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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 1, 2002, Pages 153-159

Experimental study of the influence of nanoparticle generation on the electrical characteristics of argon-silane capacitive radio-frequency plasmas

(2) Shen, Zhe a Kortshagen, Uwe a

a UNIVERSITY OF MINNESOTA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC PROPERTIES; FOURIER TRANSFORMS; GRAIN GROWTH; HARMONIC GENERATION; NANOSTRUCTURED MATERIALS; PARTICLE SIZE ANALYSIS; SILANES; SILICON SENSORS;

CURRENT VOLTAGE SENSOR; GAS PHASE NUCLEATION; RADIO FREQUENCY PLASMAS;

PLASMAS;

EID: 0036160417 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1427894 Document Type: Article

Times cited : (17)

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