Detection of particles of less than 5 nm in diameter formed in an argon-silane capacitively coupled radio-frequency discharge

Applied Physics Letters

Volumn 79, Issue 26, 2001, Pages 4301-4303

  Boufendi, L ^a   Gaudin, J ^a   Huet, S ^a   Viera, G ^a   Dudemaine, M ^a  

^a UNIVERSITÉ D'ORLÉANS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035945107     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1425431     Document Type: Article

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