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Volumn 19, Issue 14, 2003, Pages 5892-5897

Patterning NiB electroless deposited on glass using an electroplated Cu mask, microcontact printing, and wet etching

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROPLATING; ETCHING; GLASS; NICKEL; ORGANIC COMPOUNDS; PHOTOLITHOGRAPHY; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0038717551     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la0341658     Document Type: Article
Times cited : (20)

References (73)
  • 3
    • 0002158808 scopus 로고    scopus 로고
    • TFT/LCD. Liquid crystals addressed by thin-film transistors
    • OPA Amsterdam B. V.: Amsterdam, The Netherlands
    • Tsukuda, T. TFT/LCD. Liquid Crystals Addressed by Thin-Film Transistors; Japanese Technology Reviews, Vol. 29; OPA Amsterdam B. V.: Amsterdam, The Netherlands, 1996.
    • (1996) Japanese Technology Reviews , vol.29
    • Tsukuda, T.1
  • 61
    • 0038344419 scopus 로고    scopus 로고
    • note
    • Ellipsometry experiments suggested that the nickel oxide forming under ambient conditions on freshly evaporated Ni was thinner than 2 nm.
  • 62
    • 0038006350 scopus 로고    scopus 로고
    • note
    • An alkaline copper pyrophosphate bath was used because acidic Cu electroplating solutions attacked the Ni too strongly.
  • 66
    • 0011722272 scopus 로고
    • Lowenheim, F. A., Ed.; John Wiley & Sons Inc.: New York
    • Saubestre, E. B. In Modern Electroplating; Lowenheim, F. A., Ed.; John Wiley & Sons Inc.: New York, 1974; p 748.
    • (1974) Modern Electroplating , pp. 748
    • Saubestre, E.B.1
  • 68
    • 0037668609 scopus 로고    scopus 로고
    • note
    • 2 in 100 mL of water, 0.1-0.4 mL of HCl, and etching at room temperature with strong stirring.
  • 71
    • 0037668610 scopus 로고    scopus 로고
    • note
    • A thin Ni oxide forms again before the measurement and is visible in the spectrum.
  • 73
    • 0038344424 scopus 로고    scopus 로고
    • note
    • The resistance between structures separated by ∼2 μm was consistently 50 MΩ.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.