-
3
-
-
0004877075
-
-
L. T. Romankiw and D. A. Herman Jr., Eds., USA Electrochemical Society, Pennington, NJ
-
L. T. Romankiw, ECS Proc. Symp. Mag. Materials, Processes and Devices IV, Applications to Microelectromechanical Systems (MEMS), L. T. Romankiw and D. A. Herman Jr., Eds., (USA Electrochemical Society, Pennington, NJ, 1996), pp. 253-272.
-
(1996)
ECS Proc. Symp. Mag. Materials, Processes and Devices IV, Applications to Microelectromechanical Systems (MEMS)
, pp. 253-272
-
-
Romankiw, L.T.1
-
4
-
-
0022717983
-
-
E. W. Becker, W. Ehrfeld, P. Hagmann, A. Maner, D. Munchmeyer, Microelectron. Eng. 4, 35 (1986).
-
(1986)
Microelectron. Eng.
, vol.4
, pp. 35
-
-
Becker, E.W.1
Ehrfeld, W.2
Hagmann, P.3
Maner, A.4
Munchmeyer, D.5
-
6
-
-
3543017002
-
-
B. Lochel, A. Maciossek, M. Rothe, W. Windbracke, ibid., p. 663.
-
Sensors Actuators
, pp. 663
-
-
Lochel, B.1
Maciossek, A.2
Rothe, M.3
Windbracke, W.4
-
7
-
-
0029325753
-
-
D. Sander, R. Hoffmann, V. Relling, J. Muller, J. Microelectron. Syst. 4, 81 (1995).
-
(1995)
J. Microelectron. Syst.
, vol.4
, pp. 81
-
-
Sander, D.1
Hoffmann, R.2
Relling, V.3
Muller, J.4
-
9
-
-
0027660563
-
-
J. Gobet, F. Cardot, J. Bergqvist, F. Rudolf, J. Micromech. Microeng. 3, 123 (1993).
-
(1993)
J. Micromech. Microeng.
, vol.3
, pp. 123
-
-
Gobet, J.1
Cardot, F.2
Bergqvist, J.3
Rudolf, F.4
-
11
-
-
0027989015
-
-
25 to 28 January 1994, Oiso, Japan IEEE, New York
-
K. Ikuta, K. Hirowatari, T. Ogata, Proceedings of IEEE Micro Electro Mechanical Systems, 25 to 28 January 1994, Oiso, Japan (IEEE, New York, 1994), p. 1.
-
(1994)
Proceedings of IEEE Micro Electro Mechanical Systems
, pp. 1
-
-
Ikuta, K.1
Hirowatari, K.2
Ogata, T.3
-
15
-
-
0029419420
-
-
E. C. Harvey, P. T. Rumsby, M. C. Gower, J. L. Remnant, Proc. SPIE 2639, 266 (1995).
-
(1995)
Proc. SPIE
, vol.2639
, pp. 266
-
-
Harvey, E.C.1
Rumsby, P.T.2
Gower, M.C.3
Remnant, J.L.4
-
22
-
-
0031234572
-
-
Mounting the capillaries on a stage that rotated in two orthogonal directions ensured that they were evenly metalized around their circumference [J. A. Rogers, R. J. Jackman, G. M. Whitesides, J. Microelectron. Syst. 6, 184 (1997)].
-
(1997)
J. Microelectron. Syst.
, vol.6
, pp. 184
-
-
Rogers, J.A.1
Jackman, R.J.2
Whitesides, G.M.3
-
23
-
-
0030287823
-
-
A rapid prototyping technique allowed flexible photomasks to be generated quickly [D. Qin, Y. Xia, G. M. Whitesides, Adv. Mater. 8, 917 (1996)]. We used a computer-aided design program (Macro-media Freehand) to design patterns. Designs were printed onto transparencies with a commercial laser-assisted image-setting system (Herkules PRO, 3386 dpi, Linotype-Hell Company, Hauppauge, NY). The resolution of the printer limits the smallest feature size to about 20 μm. These flexible transparencies served as photomasks for photolithography. Elastomeric stamps were prepared by casting polydimethylsiloxane against a master created by performing photolithography with a flexible photomask.
-
(1996)
Adv. Mater.
, vol.8
, pp. 917
-
-
Qin, D.1
Xia, Y.2
Whitesides, G.M.3
-
25
-
-
3543001305
-
-
note
-
The dimensions and angles of wires that form the cube are adjusted relative to the circumference of the cylinder; by varying the relative dimensions, the size of the cube can be varied. The sections of wire at the corners of the cube are thinner than along the edges of the cube (about 25 versus 100 μm); these "hinges" promote bending at the corners of the cube rather than deformation of its edges.
-
-
-
-
27
-
-
0004237427
-
-
Princeton Univ. Press, Princeton, NJ
-
L. H. Kauffman, On Knots (Princeton Univ. Press, Princeton, NJ, 1987).
-
(1987)
On Knots
-
-
Kauffman, L.H.1
-
29
-
-
3543014042
-
-
note
-
Supported in part by the Defense Advanced Research Projects Agency (DARPA) and the National Science Foundation (NSF) (ECS-9729405 and PHY-9312572). The Materials Research Science and Engineering Center's shared facilities supported by the NSF under award DMR-9400396 were also used. R.J.J. gratefully acknowledges a scholarship from the Natural Sciences and Engineering Research Council of Canada.
-
-
-
|