|
Volumn 124, Issue 8, 2002, Pages 1576-1577
|
Self-assembled monolayers of alkanethiolates on palladium are good etch resists
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ALKANE;
COPPER;
ESTER;
FERRICYANIDE;
FERROCYANIDE;
GOLD;
METAL;
OXIDE;
PALLADIUM;
SILVER;
SULFUR;
THIOL DERIVATIVE;
WATER;
ARTICLE;
CHEMICAL STRUCTURE;
CORROSION;
ELECTRONICS;
FILM;
HYDROPHOBICITY;
MOLECULAR INTERACTION;
OXIDATION;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTOR;
SURFACE PROPERTY;
WRITING;
MICROSCOPY, ELECTRON, SCANNING;
PALLADIUM;
SULFHYDRYL COMPOUNDS;
SURFACE PROPERTIES;
|
EID: 0037181036
PISSN: 00027863
EISSN: None
Source Type: Journal
DOI: 10.1021/ja012569l Document Type: Article |
Times cited : (132)
|
References (25)
|