Using two-stage chemical amplification to determine the density of defects in self-assembled monolayers of alkanethiolates on gold

Langmuir

Volumn 12, Issue 13, 1996, Pages 3257-3264

  Zhao, Xiao Mei ^a   Wilbur, James L ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; ETCHING; GOLD; LITHOGRAPHY; ORGANIC COMPOUNDS; SURFACE PHENOMENA;

CHEMICAL AMPLIFICATION; HEXADECANETHIOLATES; SELF ASSEMBLED MONOLAYERS; SURFACE DENSITY;

MONOLAYERS;

EID: 0030156740     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la960044e     Document Type: Article

References (42)

1. Bain, C. D.; Troughton, E. B.; Tai, Y.-T.; Evall, J.; Whitesides, G. M.; Nuzzo, R. J. Am. Chem. Soc. 1989, 111, 321-335.
2. For reviews see: Ulman, A. An Introduction to Ultrathin Organic Films; Academic Press: San Diego, CA, 1991. Whitesides, G. M.; Gorman, C. B. In Handbook of Surface Imaging and Visualization; Hubbard, A. T., Ed.; CRC Press: Boca Raton, FL, 1995.
3. For reviews see: Ulman, A. An Introduction to Ultrathin Organic Films; Academic Press: San Diego, CA, 1991. Whitesides, G. M.; Gorman, C. B. In Handbook of Surface Imaging and Visualization; Hubbard, A. T., Ed.; CRC Press: Boca Raton, FL, 1995.
4. Kumar, A.; Biebuyck, H. A.; Abbott, N. L.; Whitesides, G. M. J. Am. Chem. Soc. 1992, 114, 9188-9189.
5. Kumar, A.; Whitesides, G. M. Appl. Phys. Lett 1993, 63, 2002-2004.
6. Kumar, A.; Biebuyck, H. A.; Whitesides, G. M. Langmuir 1994, 10, 1498-1511.
7. Wilbur, J. L.; Kumar, A.; Kim, E.; Whitesides, G. M. Adv. Mater. 1994, 7-8, 600-604.
8. Abbott, N. L.; Folkers, J. P.; Whitesides, G. M. Science 1992, 257, 1380-1382.
9. Calvert, J. M.; Georger, J. H.; Peckerar, M. C.; Pehrsson, P. E.; Schnur, J. M.; Schoen, P. E. Thin Solid Films 1992, 211, 359-363.
10. Tarlov, M. J.; Burgess, D. R. F. J.; Gillen, G. J. Am. Chem. Soc. 1993, 115, 5305-5306.
11. Huang, J.; Dahlgren, D. A.; Hemminger, J. C. Langmuir 1994, 10, 626-628.
12. Tiberio, R. C.; Craighead, H. G.; Lercel, M.; Lau, T.; Sheen, C. W.; Allara, D. L. Appl. Phys. Lett. 1993, 62, 476-478.
13. Lercel, M. J.; Redinbo, G. F.; Craighead, H. G.; Sheen, C. W.; Allara, D. L. Appl. Phys. Lett. 1994, 65, 974-976.
14. Perkins, F. K.; Dobisz, E. A.; Brandow, S. L.; Koloski, T. S.; Calvert, J. M.; Rhee, K. W.; Kosakowski, J. E.; Marrian, C. R. K. J. Vac. Sci. Technol., B 1994, 12, 3725-3730.
15. Lercel, M. J.; Redinbo, G. F.; Pardo, F. D.; Rooks, M.; Tiberio, R. C.; Simpson, P.; Craighead, H. G.; Sheen, C. W.; Parikh, A. N.; Allara, D. L. J. Vac. Sci. Technol., B 1994, 12, 3663-3667.
16. Xia, Y.; Kim, E.; Whitesides, G. M. J. Electrochem. Soc., in press.
17. Xia, Y.; Kim, E.; Mrksich, M.; Whitesides, G. M. Chem. Mater., in press.
18. Kim, E.; Kumar, A.; Whitesides, G. M. J. Electrochem. Soc. 1995, 142, 628-633.
19. Wilbur, J. L.; Whitesides, G. M. In Nanotechnology; Timp, G., Ed.; AIP Press: New York, in press.
20. Porter, M. D.; Bright, T. B.; Allara, D. L.; Chidsey, C. E. D. J. Am. Chem. Soc. 1987, 109, 3559-3568.
21. Kim, Y. T.; Bard, A. J. Langmuir 1992, 8, 1096-1102.
22. Sun, L.; Crooks, B. M. Langmuir 1993, 9, 1951-1954.
23. Sehoenenberger, C.; Sondag, H. J. A. M.; Jorritsma, J.; Fokkink, L. G. J. Langmuir 1994, 10, 611-614.
24. Sondag-Huethorst, J. A. M.; Schonenberger, C.; Fokkink, L. G. J. J. Phys. Chem. 1994, 98, 6826-6834.
25. Poirier, G. E.; Tarlov, M. J. Langmuir 1994, 10, 2853-2856.
26. Bain, C. D.; Evall, J.; Whitesides, G. M. J. Am. Chem. Soc. 1989, 111, 7155-7164.
27. Bain, C. D.; Whitesides, G. M. J. Am. Chem. Soc. 1989, 111, 7164-7175.
28. Caution Pirhana solution is extremely caustic and will ignite organic solvents and their vapors upon contact.
29. Xia, Y.; Zhao, X.-M.; Kim, E.; Whitesides, G. M., Chem. Mater. 1996, 7, 2332-2337.
30. Tisone, T. C.; Drobek, J. J. Vac. Sci. Technol. 1972, 9, 271-275.
31. Panousis, N. T.; Bonham, H. B. Proceedings of the 1973 International Reliability Physics Symposium, Las Vegas; IEEE: New York, 1973; pp 21-25.
32. Holloway, P. H.; Long, R. L., Jr. IEEE Trans. Parts, Hybrids, Packag. 1975, PHP-11, 83-88.
33. Holloway, P. H. Gold Bull. 1979, 12, 99-106.
34. Murarka, S. P.; Levinstein, H. J.; Blech, I.; Sheng, T. T.; Read, M. H. J. Electrochem. Soc. 1978, 125, 156-162.
35. Ashwell, G. B. W.; Heckingbottom, R. J. Electrochem. Soc. 1981, 128, 649-654.
36. There are many examples where corrosion products form a protective coating over a metal and thus protect it from extensive reaction. See: Adamson, A. W. Physical Chemistry of Surfaces, 5th ed.; John Wiley and Sons: New York, 1990; p 320 and references therein.
37. 2O. See refs 29-32.
38. Since the etch for Cr induced pits on the surface of Au/Cr/Si substrates but did not dissolve gold (in independent measurements), we infer that there were regions of the surface where Cr was exposed or where there was a sufficiently thin layer of gold on the Cr to allow penentration of the etching solution for Cr. The observation that the presence of Cr in the gold film did not affect the density of pits observed by chemical amplification for SAM/Au/Cr/Si substrates, even though the ferricyanide-containing etch dissolved Cr, suggests that regions where Cr or Ti were present were protected at a level equivalent to areas of SAM-protected gold. On the basis of this observation, we infer that there was a thin layer of gold (and a SAM) covering the Cr or Ti. Our results do not indicate whether the Cr or Ti was present at the surface as discrete particles or whether it was present as "tubes" that extended entirely through the gold film.
39. Chailapakul, O.; Sun, L.; Xu, C.; Crooks, R. M. J. Am. Chem. Soc. 1993, 115, 12459-12467.
40. Poirier, G. E.; Tarlov, M. J.; Rushmeier, H. E. Langmuir 1994, 10, 3383-3386.
41. Bensebaa, F.; Ellis, T. H.; Badia, A.; Lennox, R. B. J. Vac. Sci. Technol., A 1995, 13 (3), 1331-1336.
42. Chemical amplification can also be used to detect defects with alkanethiols on copper and silver, and on patterned SAMs prepared by μCP. Xia, Y.; Zhao, X.-M.; Whitesides, G. M. Unpublished results.