Patterned metallization of diamond and alumina substrates

Journal of the Electrochemical Society

Volumn 147, Issue 7, 2000, Pages 2607-2610

  Chen, Mu San ^a   Dulcey, Charles S ^a   Brandow, Susan L ^a   Leonard, Donovan N ^a   Dressick, Walter J ^a   Calvert, Jeffrey M ^b   Sims, Christopher W ^c  

^a NAVAL RESEARCH LABORATORY   (United States)

^b SHIPLEY COMPANY   (United States)

^c NAVAL SURFACE WARFARE CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ALUMINA; ELECTRIC CONDUCTIVITY OF SOLIDS; METALLIZING; PHOTORESISTS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING DIAMONDS; SUBSCRIPTION TELEVISION; SURFACE ROUGHNESS;

CHANNEL CONSTRAINED METALLIZATION (CCM);

MICROELECTRONIC PROCESSING;

EID: 0034230065     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1393576     Document Type: Article

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