TEM Sample Preparation Using A Focused Ion Beam and A Probe Manipulator

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn 1996-November, Issue , 1996, Pages 199-205

  Herlinger, L R ^a   Chevacharoenkul, S ^a   Erwin, D C ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FAILURE ANALYSIS; MANIPULATORS; PROBES; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

CROSS-SECTION TRANSMISSION; ELECTRON MICROSCOPE ANALYSIS; FOCUSED IONS BEAMS; IMAGING ANALYSIS; SAMPLE PREPARATION; SMALLER GEOMETRY DEVICES; SPATIAL RESOLUTION; SPECIFIC AREAS; STATE OF THE ART; TRANSMISSION ELECTRON;

FOCUSED ION BEAMS;

EID: 85124081109     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31399/asm.cp.istfa1996p0199     Document Type: Conference Paper

References (2)

1. M. H. F. Overwijk, F. C. van den Heuvel, and C. W. Bulle-Lieuwma, "Novel scheme for the preparation of transmission electron microscopy specimens with a focus ion beam," Journal Vacuum Science Technology B 11(6), Nov/Dec 1993 2021.
2. S. Morris, S. Tatti, E. Black, N. Dickson, H. Mendez, B. Schwiesow, and Ron Pyle," A Technique for Preparing TEM Cross Sections to a Specific Area Using the FIB, ITSFA, 1991.