A New Method for Pin Point Failure Analysis Using Fib Combined Analytical Tem

Microscopy and Microanalysis

Volumn 4, Issue , 1998, Pages 654-655

  Kamino, T ^a   Yaguchi, T ^a   Matsumoto, H ^a   Tomita, M ^a   Koike, H ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22444453891     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927600023394     Document Type: Conference Paper

References (1)

1. T.Yaguchi, et al.,Proc. Microscopy and Microanalysis, 1032(1996)