Precision transmission electron microscopy sample preparation using a focused ion beam by extraction method

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 3, 1997, Pages 610-613

  Sheng, T T ^a   Goh, G P ^a   Tung, C H ^a   Wang, L F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000507225     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589301     Document Type: Article

References (5)

1. E. C. G. Kirk, D. A. Williams, and A. Ahmed, Inst. Phys. Conf. Ser. 100, 501 (1989).
2. A. J. Leslie, K. L. Pey, K. S. Sim, M. T. F. Beh, and G. P. Goh, Proceedings ISTFA '95, Singapore, 1995, pp. 352-362.
3. M. H. F. Overwijik, F. C. vender Heuvel, and C. W. T. Bulle-Lieuwma, J. Vac. Sci. Technol. B 11, 2021 (1993).
4. R. Anderson, S. Klepeis, J. Benedict, W. G. Vandygrift, and M. Orndorff, Inst. Phys. Conf. Ser. 100, 500 (1989).
5. T. T. Sheng and R. B. Marcus, Proceedings ATFA-78, Los Angeles, CA, 1978, pp. 30-33.