FIB damage in silicon: Amorphization or redeposition?

Microscopy and Microanalysis

Volumn 8, Issue SUPPL. 2, 2002, Pages 50-51

  Rajsiri, S ^a   Kempshall, B W ^a   Schwarz, S M ^a   Giannuzzi, L A ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036409109     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/s1431927602101577     Document Type: Conference Paper

References (11)

1. L.A. Giannuzzi, et al., Mat. Res. Soc. Symp. Proc., 480 (1997) 19.
2. F.A. Stevie et al., Surf. Interface Anal. 31 (2001) 345.
3. H. Cerva et al., Inst. Phys. Conf. Ser 134 (1993) 133.
4. Abramo et al., Int. Symp. For Testing and Failure Analysis 20 (1994) 439.
5. B.I. Prenitzer et al., Microsc. Microanal. 6 (Suppl. 2) (2000) 502.
6. D.W. Susnitzky et al, Microsc. Microanal. 4 (Suppl. 2) (1998) 656.
7. C.Urbanik Shannon et al., Microsc. Microanal. 5 (Suppl. 2) (1999) 740.
8. C. Urbanik Shannon, et al., Proceedings of the Second Conference of the IUMAS (2000) 177.
9. C. Uranik Shanno, M.S. Thesis, University of Central Florida
10. T. Kamino et al., Microsc. Microanal. 6 (Suppl. 2) (2000) 510.
11. The support of NSF DMR #9703281 and Omniprobe is greatly appreciated.