Advances in the FIB lift-out technique for TEM specimen preparation: HREM lattice imaging

Microstructural Science

Volumn 26, Issue , 1998, Pages 249-253

  Giannuzzi, L A ^a   Prenitzer, B I ^a   Drown MacDonald, J L ^a   Brown, S R ^b   Irwin, R B ^b   Stevie, F A ^b   Shofner, T L ^c  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b Cirent Semiconductor   (United States)

^c Bartech   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH RESOLUTION ELECTRON MICROSCOPY; MICROELECTRONICS; SILICON WAFERS; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON TRANSPARENT MEMBRANE; FOCUSED ION BEAM LIFT-OUT TECHNIQUE;

ION BEAMS;

EID: 0004796827     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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