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Volumn 17, Issue 4, 2003, Pages 603-622

Pulsed laser repair of adhered surface-micromachined polycrystalline silicon cantilevers

Author keywords

adhesion; laser processing; MEMS; microstructure repair; stiction; surface micromachining

Indexed keywords

ADHESION ENERGY; CHEMICAL ETCHING; CRACK LENGTH; DRYING PROCESS; EQUILIBRIUM CRACKS; LASER ENERGIES; LASER FLUENCES; LASER PROCESSING; LASER REPAIR; LASER-REPAIR PROCESS; MICRO-CANTILEVERS; MICROFABRICATED; MICROMACHINED; MULTIPLE PULSE; N-DOPED; ND : YAG LASERS; NON-CONTACT; NONTHERMAL; OPERATING CONDITION; POLY-CRYSTALLINE SILICON; POLYSILICON STRUCTURES; REPAIR PROCESS; SACRIFICIAL LAYER; THERMAL HEATING; THERMAL MECHANISMS; THERMOMECHANICAL MODEL; TI: SAPPHIRE LASER; TI:SAPPHIRE; TI:SAPPHIRE LASER SYSTEMS;

EID: 0037254584     PISSN: 01694243     EISSN: 15685616     Source Type: Journal    
DOI: 10.1163/15685610360554447     Document Type: Article
Times cited : (22)

References (42)
  • 18
  • 25
    • 0002012220 scopus 로고
    • R. C. Crafer and P. J. Oakley (Eds). Chapman & Hall, London
    • T. M. W. Weedon, in:Laser Processing in Manufacturing, R. C. Crafer and P. J. Oakley (Eds), pp. 67-90. Chapman & Hall, London (1993).
    • (1993) Laser Processing in Manufacturing , pp. 67-90
    • Weedon, T.M.W.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.