Subpicosecond laser processing of polycrystalline silicon microstructures

Microscale Thermophysical Engineering

Volumn 4, Issue 1, 2000, Pages 61-75

  Phinney, Leslie M ^a   Fushinobu, Kazuyoshi ^b   Tien, Chang Lin ^c  

^a University of Illinois at Urbana Champaign   (United States)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0034413965     PISSN: 10893954     EISSN: 10893954     Source Type: Journal    
DOI: 10.1080/108939500199646     Document Type: Article

References (23)

1. N. C. Tien, S. Jeong, L. M. Phinney, K. Fushinobu, and J. Bokor. Surface Adhesion Reduction in Silicon Microstructures Using Femtosecond Laser Puises, Appl. Phys. Lett., vol. 68, pp. 197-199, 1996.
2. K. Fushinobu, L. M. Phinney, and N. C. Tien, Ultrashort-Pulse Laser Heating of Silicon to Reduce Microstructure Adhesion. Int. J. Heat Mass Transfer, vol. 39. pp. 3181-3186, 1996.
3. R. Maboudian and R. T. Howe, Critical Review: Adhesion in Surface Micromechanical Structures. J. Vacuum Sci. TechnoL B, vol. 15. pp. 1-20, 1997.
4. L. M. Phinney and C. L. Tien, Recovery Mechanisms for Stiction-Failed Microcantilevers Using Short-Pulse Lasers. Heat Transfer 1998. Proc. 11th Int. Heat Transfer Conf., vol. 5, pp. 145-150,1998.
5. K. Fushinobu, L. M. Phinney, Y. Kurosaki, and C. L. Tien. Optimization of Laser Parameters for Ultrashort-Pulse Laser Recovery of Stiction-Failed Microstructures. Numer. Heat Transfer A, vol. 36, pp. 345-357, 1999.
6. T. E. Kamins. Polycrystalline Silicon for Integrated Circuit Applications, KJuwer. Boston. 1988.
7. H. K. Park, C. P. Grigoropoulos, W. P. Leung, and A. C. Tam. A Practical Excimer Laser-Based Cleaning Tool for Removal of Surface Contaminants. IEEE Trans. Components, Packaging, Mfg. Technol, A. vol. 17. pp. 631-643, 1994.
8. M. I. Kaganov, I. M. Lifshitz, and L. V. Tanatarov. Relaxation between Electrons and the Crystalline Lattice, Sov. Phys. JETP. vol. 4. pp. 173-178, 1957
9. S. I. Anisimov, B. L. Kapeliovich, and T. L. Perel'man, Electron Emission from Metal Surfaces Exposed to Ultrashort Laser Pulses. Sov. Phys. JETP. vol. 39. pp. 375-377, 1974.
10. C. Kittel. Introduction to Solid State Physics, 6th ed., Wiley, New York. 1986.
11. H. M. van Driel. Kinetics of High-Density Plasmas Generated in Si by 1.06-and 0.53-/rm Picosecond Laser Pulses. Phys. Rev. B. vol. 35. pp. 8166-8176, 1987.
12. J. R. Goldman and J. A. Prybyla. Ultrafast Dynamics of Laser-Excited Electron Distributions in Silicon. Phys. Rev. Lett., vol. 72, pp. 1364-1367, 1994.
13. D. Agassi. Phenomenological Model for Picosecond-Pulse Laser Annealing of Semiconductors. J. Appl. Phys., vol. 55. pp. 4376-4383, 1984.
14. J. R. Meyer, M. R. Kruer, and F. J. Bartoli, Optical Heating in Semiconductors: Laser Damage in Ge. Si. InSb, and GaAs. J. Appl. Phys., vol. 51. pp. 5513-5522, 1980.
15. T. Q. Qiu and C. L. Tien. Size Effects on Nonequilibrium Laser Heating of Metal Films, J. Heat Transfer, vol. 115. pp. 842-847, 1993.
16. H. E. Elsayed-Ali, T. Juhasz, G. O. Smith, and W. E. Bron. Femtosecond Thermoreflectivity and Thermotransmissivity of Polvcrystalline and Single-Crystalline Gold Films. Phys. Rev. B. vol. 43. pp. 4488-4491, 1991.
17. M. Wraback and J. Tauc, Direct Measurement of the Hot Carrier Cooling Rate in a-Si:H Using Femtosecond 4 eV Pulses, Phys. Rev. Lett., vol. 69, pp. 3682-3685, 1992.
18. O. M. Paul, J. Korvink, and H. Bates. Determination of the Thermal Conductivity of CMOS IC Polysilicon. Sensors Actuators A, vol. 41-42, pp. 161-164. 1994
19. Y. C. Tai, C. H. Mastrangelo, and R. S. Muller, Thermal Conductivity of Heavily Doped Low-Pressure Chemical Vapor Deposited Polycrystalline Silicon Films. J. Appl. Phys., vol. 63. pp. 1442-1447, 1988.
20. J. Lubberts, B. C. Burkey, F. Moser, and E. A. Trabka, Optical Properties of Phospho-rous-Doped Crystalline Silicon Layers. J. Appl. Phys., vol. 52. pp. 6870-6878, 1981.
21. M. Kubinyi, A. Grofcski, W. J. Jones, T. E. Dyer, J. M. Marshall, and A. R. Hepburn. Picosecond Decay of Photoinduced Absorption in Undoped Amorphous and Polycrystalline Thin Films. Thin Solid Films, vol. 263, pp. 99-104, 1995.
22. S. V. Patankar, Numerical Heat Transfer and Fluid Flow. Hemisphere. New York. 1980.
23. M. Q. Brewster. Thermal and Radiative Transfer and Properties, Wiley, New York. 1992.