Ultrasonic actuation for MEMS dormancy-related stiction reduction

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4180, Issue 1, 2000, Pages 60-65

  Kaajakari, Ville ^a   Kan, Shyi Herng ^a   Lin, Amit ^a   Lal, Amit ^a   Rodgers, Steve ^b  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Dormancy; MEMS; Reliability; Stiction; Surface micromachines

Indexed keywords

MICROMACHINING; SILICON; SUBSTRATES; ULTRASONICS;

DORMANCY-RELATED STICTION REDUCTIONS; ULTRASONIC ACTUATIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034538804     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.395709     Document Type: Article

References (0)