Repair of stiction-failed, surface-micromachined polycrystalline silicon cantilevers using pulsed lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4174, Issue , 2000, Pages 279-287

  Phinney, Leslie M ^a   Rogers, James W ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; INTERFACES (MATERIALS); IRRADIATION; NEODYMIUM LASERS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SUBSTRATES;

MICROCANTILEVERS; STICTIONS; SURFACE-MICROMACHINED POLYCRYSTALLINE SILICON CANTILEVERS;

MICROMACHINING;

EID: 0034538523     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.396443     Document Type: Conference Paper

References (25)