Optimization of laser parameters for ultrashort-pulse laser recovery of stiction-failed microstructures

Numerical Heat Transfer; Part A: Applications

Volumn 36, Issue 4, 1999, Pages 345-357

  Fushinobu, Kazuyoshi ^a   Phinney, L M ^b   Kurosaki, Y ^c   Tien, C L ^d  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b University of Illinois at Urbana Champaign   (United States)

^c UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

^d UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; CRYSTAL MICROSTRUCTURE; HIGH TEMPERATURE EFFECTS; MICROELECTROMECHANICAL DEVICES; NUMERICAL METHODS; PULSED LASER APPLICATIONS; SILICON;

LASER PARAMETERS OPTIMIZATION; LATTICE TEMPERATURES; ULTRASHORT PULSE LASER IRRADIATION;

STICTION;

EID: 0033184611     PISSN: 10407782     EISSN: None     Source Type: Journal    
DOI: 10.1080/104077899274688     Document Type: Article

References (13)

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