Nanosecond laser repair of adhered MEMS structures

Journal of Heat Transfer

Volumn 124, Issue 2, 2002, Pages 394-396

  Rogers, James W ^a   Phinney, Leslie M ^a  

^a United States of America   (United States)

Author keywords

Experimental; Laser; Microscale; Microstructures; Surface adhesion

Indexed keywords

ADHESION; MICROSTRUCTURE; NEODYMIUM LASERS; POLYCRYSTALLINE MATERIALS; POLYSILICON;

SURFACE FORCES;

MICROELECTROMECHANICAL DEVICES;

ADHESION; LASER; MICROSTRUCTURE; REPAIR; STICTION;

EID: 0036536719     PISSN: 00221481     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1447936     Document Type: Article

References (12)

1. Critical review: Adhesion in surface micromechanical structures
2. Ultrashort-pulse laser heating of silicon to reduce microstructure adhesion
3. Surface adhesion reduction in silicon microstructures using femtosecond laser pulses
4. Recovery mechanisms for stiction-failed microcantilevers using short-pulse lasers
5. Optimization of laser parameters for ultrashort-pulse laser recovery of stiction-failed microstructures
6. Subpicosecond laser processing of polycrystalline silicon microstructures
7. MUMPs design handbook
8. Adhesion of polysilicon microbeams in controlled humidity ambients
9. Process yields for laser repair of aged, stiction-failed, MEMS devices
10. A thermomechanical model for adhesion reduction of MEMS microcantilevers
11. Electrical, thermoelectric, and optical properties of strongly degenerate polycrystalline silicon films
12. Optical characterization of hydrogenated silicon films in the extended energy range