The little machines that are making it big

Physics Today

Volumn 54, Issue 10, 2001, Pages 38-44

  Bishop, David ^a   Gammel, Peter ^b   Giles, C Randy ^a  

^a LUCENT TECHNOLOGIES   (United States)

^b AGERE SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMOBILES; DEPOSITION; LITHOGRAPHY; MAGNETOMETERS; MICROPHONES; PHOTORESISTS; PRESSURE GAGES; RELIABILITY; SILICON WAFERS; TELEPHONE SETS;

AIRBAGS; MICROELECTROMECHANICAL SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035476128     PISSN: 00319228     EISSN: None     Source Type: Trade Journal    
DOI: 10.1063/1.1420552     Document Type: Article

References (11)

1. Microelectromechanical systems: Technology and applications