Optical characterization of hydrogenated silicon films in the extended energy range

Materials Research Society Symposium - Proceedings

Volumn 406, Issue , 1996, Pages 313-318

  Globus, T ^a   Fonash, S J ^a   Gildenblat, G ^a  

^a UNIVERSITY OF VIRGINIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ALGORITHMS; AMORPHOUS SILICON; CRYSTAL DEFECTS; CRYSTALLINE MATERIALS; FILM GROWTH; HYDROGEN; HYDROGENATION; LIGHT TRANSMISSION; OPTICAL VARIABLES MEASUREMENT; REFRACTIVE INDEX; SUBSTRATES;

ABSORPTION COEFFICIENT; HYDROGENATED SILICON THIN FILMS; INTERFERENCE TECHNIQUE; SELF CONSISTENT DATA ANALYSIS ALGORITHMS; SPECULAR REFLECTION;

THIN FILMS;

EID: 0029777840     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)