Kinetics of radicals in CF4 and C4F8 electron cyclotron resonance plasmas

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 8, 1997, Pages 5340-5345

  Miyata, Koji ^a   Hori, Masaru ^a   Goto, Toshio ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

C4F8; CF; CF2; CF4; ECR; Fluorocarbon; IRLAS; Plasma; Radical

Indexed keywords

INFRARED DIODE LASER ABSORPTION SPECTROSCOPY (IRLAS);

ABSORPTION SPECTROSCOPY; COMPUTATIONAL METHODS; DISSOCIATION; ELECTRON CYCLOTRON RESONANCE; MATHEMATICAL MODELS; PLASMA DENSITY; PLASMAS;

FLUOROCARBONS;

EID: 0031208321     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.5340     Document Type: Article

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