Spatial and temporal variations of CF and CF2 radical densities in high-density CF4 plasmas studied by laser-induced fluorescence

Journal of Applied Physics

Volumn 82, Issue 11, 1997, Pages 5321-5326

  Suzuki, C ^a   Sasaki, K ^a   Kadota, K ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DESORPTION; EMISSION SPECTROSCOPY; FLUOROCARBONS; FREE RADICALS; LASER APPLICATIONS; PLASMA DENSITY; REACTION KINETICS;

FLUOROCARBON PLASMAS; LASER INDUCED FLUORESCENCE SPECTROSCOPY;

PLASMAS;

EID: 0031354439     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366298     Document Type: Article

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