CF2 kinetics and related mechanisms in the presence of polymers in fluorocarbon plasmas

Journal of Applied Physics

Volumn 81, Issue 5, 1997, Pages 2124-2130

  Tserepi, A D ^a   Derouard, J ^a,b   Booth, J P ^a   Sadeghi, N ^a  

^a UNIV GRENOBLE ALPES   (France)

^b INSTITUT UNIVERSITAIRE DE FRANCE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000869826     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.364255     Document Type: Article

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