Spatial distribution measurement of absolute densities of CF and CF2 radicals in a high density plasma reactor using a combination of single-path infrared diode laser absorption spectroscopy and laser-induced fluorescence technique

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 38, Issue 12 A, 1999, Pages

  Nakamura, Masayuki ^a   Nakayama, Hirotaka ^a   Ito, Masafumi ^a   Hori, Masaru ^a   Goto, Toshio ^a   Kono, Akihiro ^a   Ishii, Nobuo ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b TOKYO ELECTRON LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ELECTRON CYCLOTRON RESONANCE; EMISSION SPECTROSCOPY; FLUOROCARBONS; INFRARED SPECTROSCOPY; LASER APPLICATIONS; LASER BEAM EFFECTS; SEMICONDUCTOR LASERS;

CARBON TETRAFLUORIDE; HIGH DENSITY PLASMA REACTORS;

PLASMA DEVICES;

EID: 0033310012     PISSN: 00214922     EISSN: None     Source Type: None    
DOI: 10.1143/jjap.38.l1469     Document Type: Article

References (10)