Electrical control of the spatial uniformity of reactive species in plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 6, 1999, Pages 3281-3292

  Sobolewski, Mark A ^a   Steffens, Kristen L ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033422370     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582055     Document Type: Article

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