Time-resolved measurements of ion energy distributions and optical emissions in pulsed radio-frequency discharges

Journal of Applied Physics

Volumn 87, Issue 5, 2000, Pages 2114-2121

  Wang, Yicheng ^a   Benck, Eric C ^a   Misakian, Martin ^a   Edamura, Manabu ^a   Olthoff, James K ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001467667     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372148     Document Type: Article

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