A two-dimensional moment equations-based analysis of radio frequency capacitively coupled discharges

Journal of Applied Physics

Volumn 80, Issue 12, 1996, Pages 7154-7156

  Meyyappan, M ^a,b   Govindan, T R ^a   Kreskovsky, J P ^a  

^a Scientific Research Associates Inc   (United States)

^b NASA AMES RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4243158979     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363737     Document Type: Article

References (8)

1. M. Meyyappan, in Computational Modeling in Semiconductor Processing, edited by M. Meyyappan, Artech House (Norwood, MA, 1995), Chap. 5.
2. M. Meyyappan and T. R. Govindan, J. Appl. Phys. 74, 2250 (1993).
3. D. P. Lymberopoulos and D. J. Economou, J. Vac. Sci. Technol. A 12, 1229 (1994).
4. J. P. Bouef and L. C. Pitchford, Phys. Rev. E 51, 1376 (1995).
5. See J. Res. Natl. Inst. Stand. Technol. 100(4), 1995 (Special Issue on GEC RF Reference Cell).
6. M. Meyyappan and T. R. Govindan, IEEE Trans. Plasma Sci. 24, 119 (1996).
7. L. J. Overzet and M. B. Hopkins, Appl. Phys. Lett. 63, 2484 (1993).
8. K. E. Greenberg and G. A. Hebner, J. Appl. Phys. 73, 8126 (1993).